Real-Time Gas Analyzer Products from MKS

Real-Time Gas Analyzer Products from MKS
FT-IR, NDIR, Infrared, Mass Spectrometry, and Residual Gas Analyzer products for Continuous Gas Analysis, Process Monitoring, Stack Emissions, Trace Impurity Detection, Continuous Emissions Monitoring (CEM), Formaldehyde Emissions Monitoring, and Exhaust Gas Analysis
FTIR, NDIR Infrared Gas Analysis Products:
MultiGas™ FTIR-based analyzer products from MKS On-Line Products are capable of ppb to ppm sensitivity for multiple gas species in a variety of gas analyzer applications, such as:

stack emissions monitoring,
continuous emissions monitoring (CEM),
process monitoring,
formaldehyde emissions monitoring,
purity monitoring,
automobile, diesel, and catalyst exhaust monitoring.
InDuct™ FTIR-based gas sensors are used for fault detection, monitoring, control, or endpoint determination.

Process Sense™ is a chamber clean endpoint detector that lowers cost and increases productivity by accurately identifying the end of the chamber clean step in semiconductor and flat panel deposition chambers.



Mass Spectrometry
MKS Mass Spectrometry gas analyzer products are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), web-enabled RGA's, analytical equipment, and process RGAs and control software.

Vacuum Monitoring and e-Diagnostics
Ultra High Vacuum (UHV)
CVD Processes
Vacuum Baseline RGA
Ion Implant
Photoresist Detection
High-Pressure RGA